Fabrication of Three-Dimensional MIS Nano-Capacitor Based on Nanoimprinted Single Crystal Silicon Nanowire Arrays

Publisher: Bentham Science Publishers

E-ISSN: 1876-4037|4|4|333-338

ISSN: 1876-4029

Source: Micro and Nanosystems, Vol.4, Iss.4, 2012-12, pp. : 333-338

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Abstract