Fabrication of planar and three-dimensional microcoils on flexible substrates

Author: Woytasik M.   Grandchamp J.-P.   Dufour-Gergam E.   Martincic E.   Gilles J.-P.   Megherbi S.   Lavalley V.   Mathet V.  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.12, Iss.10-11, 2006-09, pp. : 973-978

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