Integration and Optimisation of PZT Piezoelectric Thin Films in Micro and Nano Dimensional Structures

Publisher: Bentham Science Publishers

E-ISSN: 1876-4037|1|3|214-225

ISSN: 1876-4029

Source: Micro and Nanosystems, Vol.1, Iss.3, 2009-11, pp. : 214-225

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Abstract