Integration and Optimisation of PZT Piezoelectric Thin Films in Micro and Nano Dimensional Structures

Publisher： Bentham Science Publishers

E-ISSN： 1876-4037|1|3|214-225

ISSN： 1876-4029

Source： Micro and Nanosystems, Vol.1, Iss.3, 2009-11, pp. : 214-225

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