Piezoelectric unimorph miroactuators with X-shaped structure composed of PZT thin films

Author： Kanno Isaku Tazawa Yoshiro Suzuki Takaaki Kotera Hidetoshi

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.8-10, 2007-05, pp. : 825-829

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