Frequency Response of Thin-Film Bulk Acoustic Resonators to the Deposition of Tungsten, Platinum, Aluminium Oxide and Carbon Nanotube Thin-Films

Publisher： Bentham Science Publishers

E-ISSN： 1876-4037|4|2|111-117

ISSN： 1876-4029

Source： Micro and Nanosystems, Vol.4, Iss.2, 2012-06, pp. : 111-117

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