Frequency Response of Thin-Film Bulk Acoustic Resonators to the Deposition of Tungsten, Platinum, Aluminium Oxide and Carbon Nanotube Thin-Films

Publisher: Bentham Science Publishers

E-ISSN: 1876-4037|4|2|111-117

ISSN: 1876-4029

Source: Micro and Nanosystems, Vol.4, Iss.2, 2012-06, pp. : 111-117

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Abstract