Characterization of aluminium nitride and aluminium oxide thin films sputter-deposited on organic substrates

Author： Schmid U.   Ababneh A.   Seidel H.   Wagner R.   Bauer K.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.14, Iss.4-5, 2008-04, pp. : 483-490

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