The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges

Author： Wilczek S   Trieschmann J   Schulze J   Schuengel E   Brinkmann R P   Derzsi A   Korolov I   Donkó Z   Mussenbrock T  

Publisher： IOP Publishing

E-ISSN： 1361-6595|24|2|24002-24014

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.24, Iss.2, 2015-04, pp. : 24002-24014

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