Air damping of micro bridge resonator vibrating close to a surface with a moderate distance

Author： Qiu Huacheng   Schwarz Patrick   Feili Dara   Wu Xuezhong   Seidel Helmut  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|5|55016-55024

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.5, 2015-05, pp. : 55016-55024

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