Author: Hiraiwa Morgan Kim Jong-Hoon Lee Hyun-Boo Inoue Shinnosuke Becker Annie L Weigel Kris M Cangelosi Gerard A Lee Kyong-Hoon Chung Jae-Hyun
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|5|55013-55021
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.5, 2015-05, pp. : 55013-55021
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