Device parameter optimization for sub-20 nm node HK/MG-last bulk FinFETs

Author: Miao Xu   Huaxiang Yin   Huilong Zhu   Xiaolong Ma   Weijia Xu   Yongkui Zhang   Zhiguo Zhao   Jun Luo   Hong Yang   Chunlong Li   Lingkuan Meng   Peizhen Hong   Jinjuan Xiang   Jianfeng Gao   Qiang Xu   Wenjuan Xiong   Dahai Wang   Junfeng Li   Chao Zhao   Dapeng Chen   Simon Yang   Tianchun Ye  

Publisher: IOP Publishing

ISSN: 1674-4926

Source: Journal of Semiconductors, Vol.36, Iss.4, 2015-04, pp. : 44007-44010

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Abstract