The mechanism of hydrogen plasma passivation for poly-crystalline silicon thin film

Author： Juan Li Chong Luo Zhi-Guo Meng Shao-Zhen Xiong Juan Li

E-ISSN： 1741-4199|22|10|105101-105105

ISSN： 1674-1056

Source： Chinese Physics B, Vol.22, Iss.10, 2013-10, pp. : 105101-105105

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