Author: Park Sanghoo Choe Wonho Park Sanghoo Park Sanghoo
Publisher: IOP Publishing
E-ISSN: 1361-6595|24|3|32006-32012
ISSN: 0963-0252
Source: Plasma Sources Science and Technology, Vol.24, Iss.3, 2015-06, pp. : 32006-32012
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