Silicon nanoparticle formation depending on the discharge conditions of an atmospheric radio-frequency driven microplasma with argon/silane/hydrogen gases

Publisher： IOP Publishing

E-ISSN： 1361-6463|48|31|314001-314011

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.48, Iss.31, 2015-01, pp. : 314001-314011

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Spatio-temporally resolved electron temperature in argon radio-frequency capacitive discharge at atmospheric pressure

By Park Sanghoo   Choe Wonho   Park Sanghoo   Park Sanghoo  

Plasma Sources Science and Technology, Vol. 24, Iss. 3, 2015-06 ,pp. : 32006-32012

IOP Publishing

Access to resources Recommend Favorite

Formation and behaviour of dust particleclouds in a radio-frequency discharge: results in the laboratory andunder microgravity conditions

By  

New Journal of Physics, Vol. 5, Iss. 1, 2003-03 ,pp. : 1164-1175

IOP Publishing

Access to resources Recommend Favorite

Diffuse α-mode atmospheric pressure radio-frequency discharge in neon

By Navrátil Z   Dosoudilová L   Josepson R   Dvořák P   Trunec D  

Plasma Sources Science and Technology, Vol. 23, Iss. 4, 2014-08 ,pp. : 42001-42005

IOP Publishing

Access to resources Recommend Favorite

The dynamics of radio-frequency driven atmospheric pressure plasma jets

By  

Journal of Physics: Conference Series , Vol. 162, Iss. 1, 2009-04 ,pp. : 141-148

IOP Publishing

Access to resources Recommend Favorite

Alpha to gamma mode transition in hydrogen capacitive radio-frequency discharge

By Farag Omar F.  

Canadian Journal of Physics, Vol. 91, Iss. 12, 2013-01 ,pp. : 1062-1067

NRC Research Press

Access to resources Recommend Favorite