Molecular dynamics simulation of silicon oxidation enhanced by energetic hydrogen ion irradiation

Author: Mizotani Kohei   Isobe Michiro   Fukasawa Masanaga   Nagahata Kazunori   Tatsumi Tetsuya   Hamaguchi Satoshi  

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|15|152002-152006

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.15, 2015-04, pp. : 152002-152006

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract