Low temperature growth study of nano-crystalline TiO₂ thin films deposited by RF sputtering

Author： Safeen K Micheli V Bartali R Gottardi G Laidani N

E-ISSN： 1361-6463|48|29|295201-295213

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.48, Iss.29, 2015-07, pp. : 295201-295213

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