High power impulse sputtering of chromium: correlation between the energy distribution of chromium ions and spoke formation

Author： Breilmann W   Eitrich A   Maszl C   Hecimovic A   Layes V   Benedikt J   von Keudell A  

Publisher： IOP Publishing

E-ISSN： 1361-6463|48|29|295202-295211

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.48, Iss.29, 2015-07, pp. : 295202-295211

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