Optimization of deposition rate in HiPIMS by controlling the peak target current

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Journal of Physics D: Applied Physics, Vol. 48, Iss. 49, 2015-12 ,pp. : 495204-495211

IOP Publishing

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Spoke transitions in HiPIMS discharges

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Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate

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Plasma Sources Science and Technology, Vol. 23, Iss. 5, 2014-10 ,pp. : 54008-54017

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Space charge, plasma potential and electric field distributions in HiPIMS discharges of varying configuration

By Liebig B   Bradley J W  

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On the HiPIMS benefits of multi-pulse operating mode

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Journal of Physics D: Applied Physics, Vol. 48, Iss. 1, 2015-01 ,pp. : 15202-15211

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