Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate

By Schröder Raphael   Winter Jörg        

Plasma Sources Science and Technology, Vol. 23, Iss. 5, 2014-10 ,pp. : 54008-54017

IOP Publishing

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The effect of changing the magnetic field strength on HiPIMS deposition rates

By Bradley J W   Mishra A   Kelly P J  

Journal of Physics D: Applied Physics, Vol. 48, Iss. 21, 2015-06 ,pp. : 215202-215209

IOP Publishing

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Spoke transitions in HiPIMS discharges

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Plasma Sources Science and Technology, Vol. 24, Iss. 4, 2015-01 ,pp. : 45005-45014

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Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB₆ target

By Franz Robert   Clavero César   Bolat Rustem   Mendelsberg Rueben   Anders André  

Plasma Sources Science and Technology, Vol. 23, Iss. 3, 2014-06 ,pp. : 35001-35011

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The role of pulse length in target poisoning during reactive HiPIMS: application to amorphous HfO₂

By Ganesan R   Murdoch B J   Treverrow B   Ross A E   Falconer I S   Kondyurin A   McCulloch D G   Partridge J G   McKenzie D R   Bilek M M M  

Plasma Sources Science and Technology, Vol. 24, Iss. 3, 2015-06 ,pp. : 35015-35023

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