PFM Performances Analysis of PZT Piezoelectric Nano Cantilevers Fabricated on Si Wafer

Publisher： Bentham Science Publishers

E-ISSN： 2210-6820|5|1|15-24

ISSN： 2210-6812

Source： Nanoscience & Nanotechnology-Asia, Vol.5, Iss.1, 2015-01, pp. : 15-24

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