Deposition of Fluorine‐Containing Thin Film by Atmospheric Pressure Plasma Jet and Film Surface Structural Transition

E-ISSN： 1612-8869|12|4|362-371

ISSN： 1612-8850

Source： PLASMA PROCESSES AND POLYMERS (ELECTRONIC), Vol.12, Iss.4, 2015-04, pp. : 362-371

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