In‐situ observation of chemical vapor deposition using SiHCl3 and BCl3 gases

Publisher: John Wiley & Sons Inc

E-ISSN: 1610-1642|12|7|953-957

ISSN: 1862-6351

Source: PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Vol.12, Iss.7, 2015-07, pp. : 953-957

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Abstract