Mechanical stress in silicon oxides grown on hydrogen implanted Si

Publisher： John Wiley & Sons Inc

E-ISSN： 1610-1642|9|10‐11|2203-2206

ISSN： 1862-6351

Source： PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Vol.9, Iss.10‐11, 2012-10, pp. : 2203-2206

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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