The effect of thermal annealing on the properties of PECVD hydrogenated silicon nitride

E-ISSN： 1610-1642|9|10‐11|2189-2193

ISSN： 1862-6351

Source： PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Vol.9, Iss.10‐11, 2012-10, pp. : 2189-2193

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