Soft lithographic printing and transfer of photosensitive polymers: facile fabrication of free-standing structures and patterning fragile and unconventional substrates

Author: Zhang Yaozhong   Han Jea-Hyeoung   Zhu Likun   Shannon Mark A   Yeom Junghoon  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.11, 2014-11, pp. : 115019-115029

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