Structural defects in 6H-SiC substrates and their effect on the sublimation growth of epitaxial layers in vacuum

Author: Sorokin L.   Tregubova A.   Shcheglov M.   Lebedev A.   Savkina N.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7834

Source: Physics of the Solid State, Vol.42, Iss.8, 2000-08, pp. : 1422-1426

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