Quantitative x-ray topographic analysis of the defects of 6H-SiC single crystals and homoepitaxial silicon carbide

Author: Kuznetsov G.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7842

Source: Technical Physics, Vol.44, Iss.7, 1999-07, pp. : 797-800

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