Ion-cluster reactions initiated by an electron beam in mixtures of argon with methane and monosilane

Author： Madirbaev V. Zarvin A. Korobeishchikov N. Sharafutdinov R.

ISSN： 1063-7834

Source： Physics of the Solid State, Vol.44, Iss.3, 2002-03, pp. : 515-517

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