Measuring the electron density, temperature, and electronegativity in electron beam-generated plasmas produced in argon/SF6 mixtures

Author: Boris D R   Fernsler R F   Walton S G  

Publisher: IOP Publishing

E-ISSN: 1361-6595|24|2|25032-25040

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.24, Iss.2, 2015-04, pp. : 25032-25040

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