Reactive epitaxy of cobalt disilicide on Si(100)

Author： Gomoyunova M.   Pronin I.   Valdaitsev D.   Faradzhev N.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7834

Source： Physics of the Solid State, Vol.44, Iss.6, 2002-06, pp. : 1176-1180

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