Laser-induced implantation and diffusion of magnesium into silicon

Author: Arutyunyan V.   Akhoyan A.   Adamyan Z.   Barsegyan R.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7842

Source: Technical Physics, Vol.46, Iss.2, 2001-02, pp. : 198-201

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