Effect of microwave annealing on silicon dioxide/silicon carbide structures

Author: Bacherikov Yu.   Konakova R.   Kocherov A.   Lytvyn P.   Lytvyn O.   Okhrimenko O.   Svetlichnyi A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7842

Source: Technical Physics, Vol.48, Iss.5, 2003-05, pp. : 598-601

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