Effect of rapid thermal annealing on the properties of thin dielectric films of gadolinium, titanium, and erbium oxides on the silicon carbide surface

Author： Bacherikov Yu.   Dmitruk N.   Konakova R.   Kondratenko O.   Lytvyn O.   Milenin V.   Okhrimenko O.   Kapitanchuk L.   Svetlichnyi A.   Polyakov V.   Shelcunov A.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.52, Iss.2, 2007-02, pp. : 253-257

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