Sputtering of the magnetron diode target in the presence of an external ion beam

Author： Zhukov V.   Krivobokov V.   Yanin S.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.51, Iss.4, 2006-04, pp. : 453-458

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