Extension of the temperature range of epitaxial YSZ film growth on Si(100) during magnetron sputtering

Author： Beshenkov V. Znamenskii A. Marchenko V. Pustovit A. Chernykh A.

ISSN： 1063-7842

Source： Technical Physics, Vol.52, Iss.5, 2007-05, pp. : 636-641

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