Angular distribution of atoms during the magnetron sputtering of polycrystalline targets

Author： Martynenko Yu.   Rogov A.   Shul’ga V.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.57, Iss.4, 2012-04, pp. : 439-444

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