Bolometric properties of silicon thin-film structures fabricated by plasmachemical vapor-phase deposition

Author： Zerov V.   Kulikov Yu.   Malyarov V.   Feoktistov N.   Khrebtov I.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.23, Iss.6, 1997-06, pp. : 481-483

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