Infrared spectroscopy of a silicon surface bombarded by nitrogen ions

Author: Bachurin V.   Lepshin P.   Smirnov V.   Churilov A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.24, Iss.3, 1998-03, pp. : 214-216

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