Wavy surface nanostructures formed in amorphous silicon films by sputtering with nitrogen ions

Author： Zhuravlev I.   Kibalov D.   Smirnova G.   Smirnov V.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.29, Iss.11, 2003-11, pp. : 949-950

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

PROPERTIES OF PURE SILICON AMORPHOUS FILMS PREPARED BY rf-BIAS SPUTTERING

By  

Le Journal de Physique Colloques, Vol. 42, Iss. C4, 1981-10 ,pp. : C4-623-C4-626

Edp Sciences

Access to resources Recommend Favorite

Infrared spectroscopy of a silicon surface bombarded by nitrogen ions

By Bachurin V.   Lepshin P.   Smirnov V.   Churilov A.  

Technical Physics Letters, Vol. 24, Iss. 3, 1998-03 ,pp. : 214-216

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Effect of implanted phosphorus ions on the crystallization of amorphous silicon films under the action of pulsed excimer laser radiation

By Efremov M.   Volodin V.   Arzhannikova S.   Kochubei S.   Ulasyuk V.  

Technical Physics Letters, Vol. 31, Iss. 2, 2005-02 ,pp. : 128-131

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Nanostructures formed on KBr surfaces by the impact of highly charged ions

By  

Journal of Physics: Conference Series , Vol. 194, Iss. 13, 2009-11 ,pp. : 22-22

IOP Publishing

Access to resources Recommend Favorite

Curved surface effect and emission on silicon nanostructures

By Wei-Qi Huang   Jun Yin   Nian-Jie Zhou   Zhong-Mei Huang   Xin-Jian Miao   Han-Qiong Cheng   Qin Su   Shi-Rong Liu   Chao-Jian Qin  

Chinese Physics B, Vol. 22, Iss. 10, 2013-10 ,pp. : 104204-104210

IOP Publishing

Access to resources Recommend Favorite