Influence of a methane atmosphere on the temperature dependence of the conductivity of polycrystalline silicon films

Author: Shabanov V.   Shengurov D.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.24, Iss.5, 1998-05, pp. : 377-378

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