A new method of producing thin films

Author: Khodorkovskii M.   Shakhmin A.   Murashov S.   Alekseev A.   Golod Yu.   Fedorov A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.24, Iss.5, 1998-05, pp. : 379-380

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