Catalytic plasma anodization of single-crystal 6H-SiC structures

Author： Bibilashvili A.   Gerasimov A.   Kazarov R.   Samadashvili Z.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.25, Iss.8, 1999-08, pp. : 593-594

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