The microstructure of diamond-like films on silicon studied with a laser microprojector

Author： Savintsev A.   Sozaev V.   Shidov Kh.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.27, Iss.10, 2001-10, pp. : 823-824

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