Laser-induced changes of silicon carbon films studied by vibrational spectroscopy

Author： Hobert H.   Dunken H.H.   Urban S.   Falk F.   Stafast H.  

Publisher： Elsevier

ISSN： 0924-2031

Source： Vibrational Spectroscopy, Vol.29, Iss.1, 2002-07, pp. : 177-182

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