The formation of volume elements for microelectromechanical systems in polyimide by method of reactive ion beam etching

Author： Stognij A.   Orekhovskaya T.   Timoshkov Yu.   Koryakin S.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.27, Iss.2, 2001-02, pp. : 90-92

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