Nanodimensional changes in the structure of ion-irradiated silicon crystals at a depth exceeding the ion range

Author： Kiselev A.   Levshunova V.   Perevoshchikov V.   Skupov V.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.28, Iss.7, 2002-07, pp. : 612-614

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