Application of the holographic interferometer for modeling of processes in a vapor phase epitaxy reactor

Author： Konstantinov V.   Babenko V.   Zhilyaev Yu.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.29, Iss.6, 2003-06, pp. : 521-522

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