Modification of the near-surface layer of n-Si by hydrogen ions in a high-voltage pulsed beam discharge

Author: Demkin V.   Mel’nichuk S.   Semukhin B.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.31, Iss.4, 2005-04, pp. : 295-297

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