Effect of substrate material on the structure of carbon films obtained by plasmachemical deposition

Author: Tyurnina A.   Zolotukhin A.   Obraztsov A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.32, Iss.9, 2006-09, pp. : 735-737

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