Free-standing optical filters for a nanolithography source operating in the 12–15 nm wavelength range

Author： Belik V. Zadiranov Yu. Il’inskaya N. Korlyakov A. Luchinin V. Markosov M. Seisyan R. Sher É.

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.33, Iss.6, 2007-06, pp. : 508-511

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Optical emission spectroscopy system operating in the vacuum-ultraviolet spectral range λ < 100 nm—a semi-empirical determination of sensitivity

By Carman Robert J Little Douglas J Kane Deborah M

Measurement Science and Technology, Vol. 26, Iss. 8, 2015-08 ,pp. : 85203-85207

IOP Publishing

Access to resources Recommend Favorite

Low-energy distortion-free femtosecond pulse laser inscription in coated, free-standing optical fiber

Journal of Physics: Conference Series , Vol. 679, Iss. 1, 2016-02 ,pp. : 286-289

IOP Publishing

Access to resources Recommend Favorite

Design of the aspheric Schwarzschild lens for a nanolithographer with the operating wavelength λ = 13.5 nm

By Salashchenko N. Skryl' A. Toropko M. Chkhalo N.

Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol. 5, Iss. 3, 2011-06 ,pp. : 512-516

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Rapid On-Site Formation of a Free-Standing Flexible Optical Link for Sensing Applications

By Barrios Carlos Angulo

Sensors, Vol. 16, Iss. 10, 2016-10 ,pp. : 1643-1643

MDPI

Access to resources Recommend Favorite