Properties of a low-pressure inductive RF discharge II: Mathematical simulations

Author: Aleksandrov A.   Vavilin K.   Kral’kina E.   Pavlov V.   Rukhadze A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-780X

Source: Plasma Physics Reports, Vol.33, Iss.9, 2007-09, pp. : 746-756

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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